%0 Journal Article %A M. A. Yarmolenko %A A. V. Rogachev %A Jiang Xiao Hong %A S. A. Frolov %T Kinetic regularities of deposition and molecular structure of polyoxymethylene coatings formed from the active gas phase %J Problemy fiziki, matematiki i tehniki %D 2024 %P 57-63 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/PFMT_2024_2_a9/ %G ru %F PFMT_2024_2_a9