%0 Journal Article %A A. S. Rudenkov %A D. G. Piliptsov %T Influence of heat treatment on the structure and mechanical properties of carbon coatings doped with zirconium and silicon %J Problemy fiziki, matematiki i tehniki %D 2024 %P 48-56 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/PFMT_2024_2_a8/ %G ru %F PFMT_2024_2_a8