TY  - JOUR
AU  - V. V. Emelyanov
AU  - A. N. Kupo
AU  - V. A. Emelyanov
TI  - Phenomenological model of metal coating etching in a gas mixtured plasma
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2023
SP  - 69
EP  - 73
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2023_4_a11/
LA  - ru
ID  - PFMT_2023_4_a11
ER  -