%0 Journal Article
%A V. V. Emelyanov
%A A. N. Kupo
%A V. A. Emelyanov
%T Phenomenological model of metal coating etching in a gas mixtured plasma
%J Problemy fiziki, matematiki i tehniki
%D 2023
%P 69-73
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2023_4_a11/
%G ru
%F PFMT_2023_4_a11