@article{PFMT_2023_4_a11,
     author = {V. V. Emelyanov and A. N. Kupo and V. A. Emelyanov},
     title = {Phenomenological model of metal coating etching in a gas mixtured plasma},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {69--73},
     publisher = {mathdoc},
     number = {4},
     year = {2023},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2023_4_a11/}
}