%0 Journal Article
%A A. N. Kupo
%A V. V. Emelyanov
%A V. A. Emelyanov
%T Modeling of ir radiation influence on the phase composition of silicon dioxide coatings
%J Problemy fiziki, matematiki i tehniki
%D 2023
%P 64-68
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2023_3_a11/
%G ru
%F PFMT_2023_3_a11