@article{PFMT_2023_3_a11, author = {A. N. Kupo and V. V. Emelyanov and V. A. Emelyanov}, title = {Modeling of ir radiation influence on the phase composition of silicon dioxide coatings}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {64--68}, publisher = {mathdoc}, number = {3}, year = {2023}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2023_3_a11/} }