@article{PFMT_2023_2_a12, author = {H. T. Doan and D. A. Golosov and J. Zhang and N. A. Kananovich and S. M. Zavadski and S. N. Melnikov}, title = {Influence of aluminum doping degree on the properties of titanium-aluminum oxide films}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {74--82}, publisher = {mathdoc}, number = {2}, year = {2023}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2023_2_a12/} }