TY  - JOUR
AU  - H. T. Doan
AU  - D. A. Golosov
AU  - V. A. Burdovitsin
AU  - S. M. Zavadski
AU  - S. N. Melnikov
TI  - Peculiarity of reactive magnetron deposition of tantalum oxide films with different methods of gas supply into the chamber
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2022
SP  - 97
EP  - 104
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2022_3_a16/
LA  - ru
ID  - PFMT_2022_3_a16
ER  -