%0 Journal Article
%A H. T. Doan
%A D. A. Golosov
%A V. A. Burdovitsin
%A S. M. Zavadski
%A S. N. Melnikov
%T Peculiarity of reactive magnetron deposition of tantalum oxide films with different methods of gas supply into the chamber
%J Problemy fiziki, matematiki i tehniki
%D 2022
%P 97-104
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2022_3_a16/
%G ru
%F PFMT_2022_3_a16