@article{PFMT_2022_3_a16,
     author = {H. T. Doan and D. A. Golosov and V. A. Burdovitsin and S. M. Zavadski and S. N. Melnikov},
     title = {Peculiarity of reactive magnetron deposition of tantalum oxide films with different methods of gas supply into the chamber},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {97--104},
     publisher = {mathdoc},
     number = {3},
     year = {2022},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2022_3_a16/}
}