TY - JOUR AU - V. A. Emelyanov AU - E. B. Shershnev AU - Yu. V. Nikitjuk AU - S. I. Sokolov AU - I. Y. Aushev TI - Optimization of laser polishing of quartz glass using the method of planning computational experiments JO - Problemy fiziki, matematiki i tehniki PY - 2022 SP - 26 EP - 30 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/PFMT_2022_2_a4/ LA - ru ID - PFMT_2022_2_a4 ER -