%0 Journal Article
%A A. S. Rudenkov
%A A. V. Rogachev
%A D. G. Piliptsou
%T Morphology and phase composition of silicon-doped titanium carbon coatings
%J Problemy fiziki, matematiki i tehniki
%D 2021
%P 37-41
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2021_3_a5/
%G ru
%F PFMT_2021_3_a5