@article{PFMT_2021_3_a5, author = {A. S. Rudenkov and A. V. Rogachev and D. G. Piliptsou}, title = {Morphology and phase composition of silicon-doped titanium carbon coatings}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {37--41}, publisher = {mathdoc}, number = {3}, year = {2021}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2021_3_a5/} }