TY  - JOUR
AU  - M. A. Yarmolenko
AU  - O. A. Sarkisov
AU  - Liu Yiming
AU  - A. V. Rogachev
TI  - The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2021
SP  - 38
EP  - 43
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/
LA  - ru
ID  - PFMT_2021_1_a5
ER  -