%0 Journal Article
%A M. A. Yarmolenko
%A O. A. Sarkisov
%A Liu Yiming
%A A. V. Rogachev
%T The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology
%J Problemy fiziki, matematiki i tehniki
%D 2021
%P 38-43
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/
%G ru
%F PFMT_2021_1_a5