@article{PFMT_2021_1_a5,
     author = {M. A. Yarmolenko and O. A. Sarkisov and Liu Yiming and A. V. Rogachev},
     title = {The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {38--43},
     publisher = {mathdoc},
     number = {1},
     year = {2021},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2021_1_a5/}
}