TY  - JOUR
AU  - E. A. Kulesh
AU  - A. V. Rogachev
AU  - D. G. Piliptsou
AU  - Xiaohong Jiang
AU  - A. S. Rudenkov
TI  - Structure and properties of a-C films containing metals and products of their interaction with nitrogen, carbon
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2021
SP  - 24
EP  - 30
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2021_1_a3/
LA  - ru
ID  - PFMT_2021_1_a3
ER  -