%0 Journal Article
%A E. A. Kulesh
%A A. V. Rogachev
%A D. G. Piliptsou
%A Xiaohong Jiang
%A A. S. Rudenkov
%T Structure and properties of a-C films containing metals and products of their interaction with nitrogen, carbon
%J Problemy fiziki, matematiki i tehniki
%D 2021
%P 24-30
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2021_1_a3/
%G ru
%F PFMT_2021_1_a3