%0 Journal Article
%A M. A. Yarmolenko
%A A. S. Rudenkov
%A A. V. Rogachev
%A E. Rusu
%A A. V. Semchenko
%A V. V. Sidsky
%T Electron beam synthesis, structure and properties of single-component and magnesium doped zinc oxide coatings
%J Problemy fiziki, matematiki i tehniki
%D 2020
%P 81-87
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2020_4_a13/
%G ru
%F PFMT_2020_4_a13