@article{PFMT_2020_4_a13, author = {M. A. Yarmolenko and A. S. Rudenkov and A. V. Rogachev and E. Rusu and A. V. Semchenko and V. V. Sidsky}, title = {Electron beam synthesis, structure and properties of single-component and magnesium doped zinc oxide coatings}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {81--87}, publisher = {mathdoc}, number = {4}, year = {2020}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2020_4_a13/} }