TY  - JOUR
AU  - V. V. Vaskevich
AU  - V. E. Gaishun
AU  - D. L. Kovalenko
AU  - Sungwook Mhin
AU  - M. I. Moskvichyov
AU  - A. N. Petlitskiy
AU  - D. V. Zhyhulin
TI  - Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2020
SP  - 7
EP  - 14
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/
LA  - ru
ID  - PFMT_2020_4_a0
ER  -