%0 Journal Article
%A V. V. Vaskevich
%A V. E. Gaishun
%A D. L. Kovalenko
%A Sungwook Mhin
%A M. I. Moskvichyov
%A A. N. Petlitskiy
%A D. V. Zhyhulin
%T Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits
%J Problemy fiziki, matematiki i tehniki
%D 2020
%P 7-14
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/
%G ru
%F PFMT_2020_4_a0