@article{PFMT_2020_4_a0,
     author = {V. V. Vaskevich and V. E. Gaishun and D. L. Kovalenko and Sungwook Mhin and M. I. Moskvichyov and A. N. Petlitskiy and D. V. Zhyhulin},
     title = {Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {7--14},
     publisher = {mathdoc},
     number = {4},
     year = {2020},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2020_4_a0/}
}