TY  - JOUR
AU  - A. V. Rogachev
AU  - V. A. Emelyanov
AU  - Liu Yiming
AU  - M. A. Yarmolenko
AU  - A. S. Rudenkov
TI  - Features of the formation of coatings of metal oxides from the active gas phase under conditions of electron-initiated endothermic processes
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2020
SP  - 50
EP  - 54
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2020_3_a7/
LA  - ru
ID  - PFMT_2020_3_a7
ER  -