%0 Journal Article
%A A. V. Rogachev
%A V. A. Emelyanov
%A Liu Yiming
%A M. A. Yarmolenko
%A A. S. Rudenkov
%T Features of the formation of coatings of metal oxides from the active gas phase under conditions of electron-initiated endothermic processes
%J Problemy fiziki, matematiki i tehniki
%D 2020
%P 50-54
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2020_3_a7/
%G ru
%F PFMT_2020_3_a7