@article{PFMT_2020_3_a7, author = {A. V. Rogachev and V. A. Emelyanov and Liu Yiming and M. A. Yarmolenko and A. S. Rudenkov}, title = {Features of the formation of coatings of metal oxides from the active gas phase under conditions of electron-initiated endothermic processes}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {50--54}, publisher = {mathdoc}, number = {3}, year = {2020}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2020_3_a7/} }