TY  - JOUR
AU  - Yu. V. Nikitjuk
TI  - Investigation of the process of laser splitting of two-layer structures of silicon plates and glass substrates
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2020
SP  - 44
EP  - 49
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2020_3_a6/
LA  - ru
ID  - PFMT_2020_3_a6
ER  -