%0 Journal Article
%A Yu. V. Nikitjuk
%T Investigation of the process of laser splitting of two-layer structures of silicon plates and glass substrates
%J Problemy fiziki, matematiki i tehniki
%D 2020
%P 44-49
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2020_3_a6/
%G ru
%F PFMT_2020_3_a6