@article{PFMT_2020_3_a6,
     author = {Yu. V. Nikitjuk},
     title = {Investigation of the process of laser splitting of two-layer structures of silicon plates and glass substrates},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {44--49},
     publisher = {mathdoc},
     number = {3},
     year = {2020},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2020_3_a6/}
}