@article{PFMT_2020_1_a1,
     author = {N. Villa and D. A. Golosov and S. N. Melnikov and T. D. Nguyen and A. D. Golosov and E. E. Litvin and N. N. Lam},
     title = {Formation of tantalum oxide films on substrates with a diameter of 200 mm},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {12--17},
     publisher = {mathdoc},
     number = {1},
     year = {2020},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2020_1_a1/}
}