TY  - JOUR
AU  - N. Villa
AU  - D. A. Golosov
AU  - T. D. Nguyen
TI  - Dielectric properties of tantalum oxide thin films deposited by reactive magnetron sputtering
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2019
SP  - 15
EP  - 20
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2019_2_a1/
LA  - ru
ID  - PFMT_2019_2_a1
ER  -