%0 Journal Article
%A N. Villa
%A D. A. Golosov
%A T. D. Nguyen
%T Dielectric properties of tantalum oxide thin films deposited by reactive magnetron sputtering
%J Problemy fiziki, matematiki i tehniki
%D 2019
%P 15-20
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2019_2_a1/
%G ru
%F PFMT_2019_2_a1