@article{PFMT_2019_2_a1,
     author = {N. Villa and D. A. Golosov and T. D. Nguyen},
     title = {Dielectric properties of tantalum oxide thin films deposited by reactive magnetron sputtering},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {15--20},
     publisher = {mathdoc},
     number = {2},
     year = {2019},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2019_2_a1/}
}