TY  - JOUR
AU  - V. V. Sidsky
AU  - A. V. Semchenko
AU  - V. E. Gaishun
AU  - D. L. Kovalenko
AU  - A. S. Khanna
TI  - Effects of additional vacuum annealing on the structure, electrical and optical properties of ZnO:Al films synthesized by sol-gel
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2018
SP  - 44
EP  - 46
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2018_4_a7/
LA  - ru
ID  - PFMT_2018_4_a7
ER  -