%0 Journal Article
%A V. V. Sidsky
%A A. V. Semchenko
%A V. E. Gaishun
%A D. L. Kovalenko
%A A. S. Khanna
%T Effects of additional vacuum annealing on the structure, electrical and optical properties of ZnO:Al films synthesized by sol-gel
%J Problemy fiziki, matematiki i tehniki
%D 2018
%P 44-46
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2018_4_a7/
%G ru
%F PFMT_2018_4_a7