@article{PFMT_2018_4_a7,
     author = {V. V. Sidsky and A. V. Semchenko and V. E. Gaishun and D. L. Kovalenko and A. S. Khanna},
     title = {Effects of additional vacuum annealing on the structure, electrical and optical properties of {ZnO:Al} films synthesized by sol-gel},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {44--46},
     publisher = {mathdoc},
     number = {4},
     year = {2018},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2018_4_a7/}
}