TY  - JOUR
AU  - Ya. A. Kosenok
AU  - V. E. Gaishun
AU  - O. I. Tyulenkova
TI  - Investigation of the near-surface damaged layer in monocrystalline silicon wafers after chemical-mechanical polishing
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2018
SP  - 25
EP  - 29
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2018_4_a4/
LA  - ru
ID  - PFMT_2018_4_a4
ER  -