%0 Journal Article
%A Ya. A. Kosenok
%A V. E. Gaishun
%A O. I. Tyulenkova
%T Investigation of the near-surface damaged layer in monocrystalline silicon wafers after chemical-mechanical polishing
%J Problemy fiziki, matematiki i tehniki
%D 2018
%P 25-29
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2018_4_a4/
%G ru
%F PFMT_2018_4_a4