@article{PFMT_2018_4_a4,
     author = {Ya. A. Kosenok and V. E. Gaishun and O. I. Tyulenkova},
     title = {Investigation of the near-surface damaged layer in monocrystalline silicon wafers after chemical-mechanical polishing},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {25--29},
     publisher = {mathdoc},
     number = {4},
     year = {2018},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2018_4_a4/}
}