TY  - JOUR
AU  - M. A. Yarmolenko
AU  - A. A. Rogachev
AU  - A. V. Rogachev
TI  - The impact of technological processes on the properties of polymer-based coatings deposited from active gas phase (Review). 2. Influence of conditions and parameters of the processes proceeding on the deposited surface
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2016
SP  - 35
EP  - 40
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2016_4_a5/
LA  - ru
ID  - PFMT_2016_4_a5
ER  -