%0 Journal Article
%A M. A. Yarmolenko
%A A. A. Rogachev
%A A. V. Rogachev
%T The impact of technological processes on the properties of polymer-based coatings deposited from active gas phase (Review). 2. Influence of conditions and parameters of the processes proceeding on the deposited surface
%J Problemy fiziki, matematiki i tehniki
%D 2016
%P 35-40
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2016_4_a5/
%G ru
%F PFMT_2016_4_a5