@article{PFMT_2016_4_a5,
     author = {M. A. Yarmolenko and A. A. Rogachev and A. V. Rogachev},
     title = {The impact of technological processes on the properties of polymer-based coatings deposited from active gas phase {(Review).} 2. {Influence} of conditions and parameters of the processes proceeding on the deposited surface},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {35--40},
     publisher = {mathdoc},
     number = {4},
     year = {2016},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2016_4_a5/}
}