TY  - JOUR
AU  - M. A. Yarmolenko
AU  - A. A. Rogachev
AU  - A. V. Rogachev
TI  - Influence of technological processes of forming on the properties of coatings based on polymers deposited from active gas phase (review). 1. Effect of conditions and modes of gas phase generation
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2016
SP  - 29
EP  - 38
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2016_2_a4/
LA  - ru
ID  - PFMT_2016_2_a4
ER  -