%0 Journal Article
%A M. A. Yarmolenko
%A A. A. Rogachev
%A A. V. Rogachev
%T Influence of technological processes of forming on the properties of coatings based on polymers deposited from active gas phase (review). 1. Effect of conditions and modes of gas phase generation
%J Problemy fiziki, matematiki i tehniki
%D 2016
%P 29-38
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2016_2_a4/
%G ru
%F PFMT_2016_2_a4