@article{PFMT_2016_2_a4,
     author = {M. A. Yarmolenko and A. A. Rogachev and A. V. Rogachev},
     title = {Influence of technological processes of forming on the properties of coatings based on polymers deposited from active gas phase (review). 1. {Effect} of conditions and modes of gas phase generation},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {29--38},
     publisher = {mathdoc},
     number = {2},
     year = {2016},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2016_2_a4/}
}