@article{PFMT_2016_2_a1,
     author = {A. P. Dostanko and D. A. Golosov and S. M. Zavadski and S. N. Melnikov and J. E. Okojie and J. D. Kotingo and G. M. Ruban},
     title = {Formation of titanium nitride films by reactive magnetron sputtering under low pressure},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {12--17},
     publisher = {mathdoc},
     number = {2},
     year = {2016},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2016_2_a1/}
}