TY  - JOUR
AU  - Ya. A. Kosenok
AU  - V. E. Gaishun
AU  - O. I. Tyulenkova
AU  - V. G. Denisman
TI  - Aqueous compositions based on nanosized silica particles for chemical-mechanical polishing of silicon wafers
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2014
SP  - 26
EP  - 31
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2014_3_a4/
LA  - ru
ID  - PFMT_2014_3_a4
ER  -