%0 Journal Article
%A Ya. A. Kosenok
%A V. E. Gaishun
%A O. I. Tyulenkova
%A V. G. Denisman
%T Aqueous compositions based on nanosized silica particles for chemical-mechanical polishing of silicon wafers
%J Problemy fiziki, matematiki i tehniki
%D 2014
%P 26-31
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2014_3_a4/
%G ru
%F PFMT_2014_3_a4