@article{PFMT_2014_3_a4,
     author = {Ya. A. Kosenok and V. E. Gaishun and O. I. Tyulenkova and V. G. Denisman},
     title = {Aqueous compositions based on nanosized silica particles for chemical-mechanical polishing of silicon wafers},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {26--31},
     publisher = {mathdoc},
     number = {3},
     year = {2014},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2014_3_a4/}
}